To detect Silicon Carbide, Sapphire, Silicon and other translucent wafers.
Applicable to 6, 8 and 12 inch wafers
Translucent wafer mode (8 and 12 inch models)
Free from Electrostatic effects (comb sensor unit)

 Rating / Performance / Specification 
http://www.takex-elec.co.jp/en/product/type/series/526